X-Ray Reflectometry (XRR) is a highly sensitive surface analytical technique used in chemistry, physics and materials science to characterize surfaces, thin films and multilayers. In Energy dispersive X-Ray Reflectometry (EDXR) a polychromatic beam is used as a probe.
The idea behind the technique is to reflect an X-ray beam from a flat surface and then measure the intensity of the X-rays reflected in the mirror direction (reflected angle equal to the incident angle). If the interface is not perfectly uniform or a film (or multilayer) on a substrate is investigated, the reflected intensity and the direction of the reflected beam differ from the exact specular direction (due to refraction in the media) resulting in interference fringes. The deviations can then be analyzed to obtain the density profile of the interface normal to the surface, thickness and roughness of the surface and interfaces of the investigated materials, by means of theoretical modeling.
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