The custom-made probe setup consists of four equally spaced (0.75 mm) metal tips with finite radius. Each tip is supported by springs on the other end to minimize sample damage during probing. The four metal tips are part of a manual stage which travels up and down and permits an easy loading of the samples.
The custom system core employs a small vacuum chamber equipped with a rotative pump and an optional turbo pump.
The system measures sheet resistance and resistivity of samples in a temperature range up to 350° C. Current and voltage are applied and measured by means of Keithley 6220 current source and 2182A nanovoltmeter. The separation of voltage and current electrodes eliminates the effect of contact resistance from the measurement result.
Measurements can be performed in controlled atmosphere, with a constant gas flux.
The custom system core employs a small vacuum chamber equipped with a rotative pump and an optional turbo pump.
The system measures sheet resistance and resistivity of samples in a temperature range up to 350° C. Current and voltage are applied and measured by means of Keithley 6220 current source and 2182A nanovoltmeter. The separation of voltage and current electrodes eliminates the effect of contact resistance from the measurement result.
Measurements can be performed in controlled atmosphere, with a constant gas flux.
TECHNICAL SPECIFICATIONS
- Base pressure: 5 x 10-3 mbar;
- Temperature range: RT up to 350 °C;
- Current source resolution: 0.1 pA;
- Maximum supplied current: 105 mA;
- Nanovoltmeter resolution: 1 nV.
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